Levitation Linear Motors for Precision Positioning
نویسندگان
چکیده
منابع مشابه
Implementation of High Precision Positioning Systems Using Contactless Magnetic Levitation
Implementation of High Precision Positioning Systems Using Contactless Magnetic Levitation Robert Brydon Owen Masters of Applied Science Graduate Department of Electrical and Computer Engineering University of Toronto 2005 This thesis presents the implementation and control of two high precision positioning systems based on contactless magnetic levitation, actuated by means of permanent magnet ...
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High accuracy positioning stages with multiple degrees-of-freedom are ubiquitous in industrial manufacturing. Examples include probing and inspection systems, disk drive head assembly systems, and photolithographic positioning stages (microsteppers) in semiconductor manufacturing. Microsteppers are typically made of a lower-stage that actuates large high-speed movements and an upper-stage that ...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Industry Applications
سال: 2006
ISSN: 0913-6339,1348-8163
DOI: 10.1541/ieejias.126.1345